Title:
【発明の名称】変位測定装置
Document Type and Number:
Japanese Patent JP2878913
Kind Code:
B2
Abstract:
A measuring device for absolute measurement of positions is disclosed, which comprises a displacement sensor having a fixed element and a movable element which is relatively movable against the fixed element and being adapted to output a signal corresponding to the relative position of the movable element against the fixed element, demodulators for processing the output signal of the displacement sensor so as to obtain cyclic square signals for detecting at least two types of displacement of coarse scale and fine scale, each edge of the square signals having phase information, phase detectors for detecting phase information from each square signal obtained by the demodulators so as to obtain phase data of at least coarse scale and fine scale, a composing circuit for composing phase data of the coarse scale and fine scale obtained by the phase detectors so as to obtain an absolute displacement of the movable element against the fixed element, a display portion for displaying the absolute displacement obtained by the composing circuit at predetermined refresh cycles, and a control circuit having a timer for limiting the period of the operation of the demodulators and the phase detectors for sampling phase data.
Inventors:
ADACHI SATOSHI
Application Number:
JP27091292A
Publication Date:
April 05, 1999
Filing Date:
September 14, 1992
Export Citation:
Assignee:
MITSUTOYO KK
International Classes:
G01B7/00; G01B7/02; G01B21/02; G01D5/241; G01D5/245; (IPC1-7): G01B7/00
Attorney, Agent or Firm:
Itami Masaru