Title:
【発明の名称】二重空気膜構造クリーンルーム
Document Type and Number:
Japanese Patent JP2549910
Kind Code:
B2
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Inventors:
SHINTAKU TADASHI
NISHIMURA HAJIME
NISHIMURA HAJIME
Application Number:
JP403689A
Publication Date:
October 30, 1996
Filing Date:
January 11, 1989
Export Citation:
Assignee:
DYNIC CORP
International Classes:
E04H5/02; B01L1/04; E04H15/20; F24F7/06; (IPC1-7): F24F7/06; B01L1/04; E04H5/02; E04H15/20
Domestic Patent References:
| JP63165670A | ||||
| JP59215528A |
Attorney, Agent or Firm:
Nagasawa Yukio