Title:
【発明の名称】プラズマエッチング用電極板
Document Type and Number:
Japanese Patent JP2775290
Kind Code:
B2
More Like This:
Inventors:
MINORA SEIJI
HORIO TAISHIN
HORIO TAISHIN
Application Number:
JP11566889A
Publication Date:
July 16, 1998
Filing Date:
May 08, 1989
Export Citation:
Assignee:
IBIDEN KK
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; C23F4/00
Attorney, Agent or Firm:
Hironori Takenori