PURPOSE: To transfer lots of stampers by sputtering a metal element or inorg. compd. having high melting point on the surface of the master disk of photosensitive resin film to form a thin film.
CONSTITUTION: A thin film 2 is formed by sputtering on the master disk of a photosensitive resin film having at least one of guide grooves and rugged pattern in which information is recorded by using a metal or inorg. compd. having low melting point. Thereby, a peeling layer having small particles size can be formed. Or, by forming a metal thin film 2 having good adhesion property with the photosensitive resin film and then a metal thin film having good peeling property with the stamper 8 is laminated to form a multilayer structure, adhesion property with the master disk is improved and the stamper 8 has higher peeling property. Thus, lots of stampers can be formed by transferring from the master disk.
ANZAI YUMIKO
MIYAMURA YOSHINORI
MIYAMOTO JIICHI
HORIGOME SHINKICHI
HITACHI MAXELL