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Title:
【発明の名称】電磁波透過体
Document Type and Number:
Japanese Patent JP2862779
Kind Code:
B2
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Inventors:
USHIGOE RYUSUKE
UMEMOTO KOICHI
Application Number:
JP28923093A
Publication Date:
March 03, 1999
Filing Date:
November 18, 1993
Export Citation:
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Assignee:
NIPPON GAISHI KK
International Classes:
H05H1/46; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H05H1/46; C23F4/00; H01L21/3065
Domestic Patent References:
JP7142414A
Attorney, Agent or Firm:
Akihide Sugimura (8 outside)



 
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