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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS59957
Kind Code:
A
Abstract:

PURPOSE: To facilitate the writing of information and to enhance the manufacturing yield of a semiconductor device by arranging an energy beam shielding film which has an insulating film to cover fuse wirings and a hole at the top of the fuse wirings on the insulating film to cover the insulating film.

CONSTITUTION: A fuse wiring type semiconductor device is formed of a silicon substrate 11, fuse wirings 2, wiring connection pads 3a, 3b, an interlayer insulating film 4, a surface protecting insulating film 7, aluminum wirings 6a, 6b and an energy beam shielding film 9. the film 9 has a high reflectivity to the energy beam. A hole 10 is formed at the top of the wirings 2 and has a side length corresponding to the cutting length of the wirings 2. The energy beam is emitted via the hole 10 formed at the film 9 to the wirings 2, thereby cutting the wirings 2.


Inventors:
IWAI TAKASHI
SASAKI NOBUO
Application Number:
JP10959582A
Publication Date:
January 06, 1984
Filing Date:
June 25, 1982
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/3205; H01L23/52; H01L23/525; H01L27/10; (IPC1-7): H01L21/88; H01L27/10
Domestic Patent References:
JPS5775442A1982-05-12
JPS5856355A1983-04-04
Attorney, Agent or Firm:
Sadaichi Igita