Title:
【発明の名称】静電チャック
Document Type and Number:
Japanese Patent JP2925427
Kind Code:
B2
Inventors:
KUBOTA YOSHIHIRO
KAWAI MAKOTO
KOJIMA SHINJI
KAWAI MAKOTO
KOJIMA SHINJI
Application Number:
JP11290793A
Publication Date:
July 28, 1999
Filing Date:
May 14, 1993
Export Citation:
Assignee:
SHINETSU KAGAKU KOGYO KK
International Classes:
B23Q3/15; H01L21/301; H01L21/68; H01L21/683; H01L21/78; H02N13/00; (IPC1-7): H01L21/68; B23Q3/15; H01L21/301; H02N13/00
Domestic Patent References:
| JP536819A | ||||
| JP5102289A | ||||
| JP4287344A | ||||
| JP227748A | ||||
| JP4186653A | ||||
| JP661202A |
Attorney, Agent or Firm:
Ryoichi Yamamoto (1 person outside)