Title:
【発明の名称】静電チャック
Document Type and Number:
Japanese Patent JP3369505
Kind Code:
B2
Inventors:
Motohiro Umezu
Mamoru Ishii
Hironori Ishida
Hiroyuki Matsuo
Kazusuke Minamizawa
Yukio Kishi
Kazunori Saito
Hiroshi Suzuki
Mamoru Ishii
Hironori Ishida
Hiroyuki Matsuo
Kazusuke Minamizawa
Yukio Kishi
Kazunori Saito
Hiroshi Suzuki
Application Number:
JP10494099A
Publication Date:
January 20, 2003
Filing Date:
April 13, 1999
Export Citation:
Assignee:
Taiheiyo Cement Co., Ltd.
Nippon Ceratech Co., Ltd.
Nippon Ceratech Co., Ltd.
International Classes:
B23Q3/15; H01L21/68; H01L21/683; H02N13/00; (IPC1-7): H01L21/68; B23Q3/15; H02N13/00
Domestic Patent References:
| JP9199578A | ||||
| JP4296040A | ||||
| JP104083A | ||||
| JP697675B2 |
Attorney, Agent or Firm:
Hiroshi Takayama