Title:
【発明の名称】エッチング方法
Document Type and Number:
Japanese Patent JP3320111
Kind Code:
B2
Inventors:
Sunakoguchi Shichirou
Kenichi Tsukui
Yoshikatsu Kubota
Yoshitsugu Ishizuka
Kenichi Tsukui
Yoshikatsu Kubota
Yoshitsugu Ishizuka
Application Number:
JP22877192A
Publication Date:
September 03, 2002
Filing Date:
August 27, 1992
Export Citation:
Assignee:
Asahi Denka Kogyo Co., Ltd.
International Classes:
C23F1/18; C23F1/28; H01L21/306; (IPC1-7): C23F1/18; C23F1/28
Domestic Patent References:
| JP4122090A | ||||
| JP222483A | ||||
| JP6487788A |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)