【発明の名称】露光方法

Title:

【発明の名称】露光方法

Document Type and Number:

Japanese Patent JP3094439

Kind Code:

B2

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Inventors:

Shigeru Hirukawa
Masaomi Kameyama
Kyouichi Suwa
Nobutaka Magome

Application Number:

JP31414890A

Publication Date:

October 03, 2000

Filing Date:

November 21, 1990

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G03F1/30; G03F1/70; H01L21/027; (IPC1-7): G03F1/08; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Takao Watanabe (1 outside)

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