Title:
【発明の名称】露光装置
Document Type and Number:
Japanese Patent JP2622841
Kind Code:
B2
Inventors:
Marui Masatoshi
Satoshi Inage
Yuji Matsui
Satoshi Inage
Yuji Matsui
Application Number:
JP23983287A
Publication Date:
June 25, 1997
Filing Date:
September 24, 1987
Export Citation:
Assignee:
Asahi Optical Co., Ltd.
International Classes:
H05K3/00; G02F1/13; G03B27/32; (IPC1-7): G02F1/13; G02F1/13; G03B27/32
Domestic Patent References:
| JP62198882A | ||||
| JP6128927A | ||||
| JP516565A | ||||
| JP6244718A |
Attorney, Agent or Firm:
Tamio Nishiwaki