【発明の名称】露光装置

Title:

【発明の名称】露光装置

Document Type and Number:

Japanese Patent JP2550966

Kind Code:

B2

Inventors:

UCHIDA GEN
MATSUMOTO KOICHI
KIUCHI TOORU

Application Number:

JP1388087A

Publication Date:

November 06, 1996

Filing Date:

January 23, 1987

Export Citation:

Assignee:

NIPPON KOGAKU KK

International Classes:

G03F9/00; G01B11/00; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G01B11/00; G03F7/20; G03F9/00

Domestic Patent References:

JP63136619A

Attorney, Agent or Firm:

Takao Watanabe

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