【発明の名称】露光装置

Title:

【発明の名称】露光装置

Document Type and Number:

Japanese Patent JP2743199

Kind Code:

B2

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Inventors:

Ryuichi Ebinuma
Yutaka Watanabe
Nobutoshi Mizusawa
Kariya Takuo
Shunichi Uzawa

Application Number:

JP25707689A

Publication Date:

April 22, 1998

Filing Date:

October 03, 1989

Export Citation:

Assignee:

Canon Inc

International Classes:

G03F9/00; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F9/00

Domestic Patent References:

JP1243421A
JP2202010A

Attorney, Agent or Firm:

Tetsuya Ito (1 outside)

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