PURPOSE: To provide a waste liquid recovery apparatus which is able to recover automatically waste liquid discharged from a semiconductor manufacturing device.

CONSTITUTION: A waste liquid recovery device is composed of plural valve boxes 6 each of which is equipped with a light sensor 8 for detecting waste liquid leaking and also a valve 11 for shutting off the waste liquid flow; plural first pipe passages 10 which connect plural semiconductor manufacturing device 1 to the plural valve boxes 6 separately for leading the waste liquid discharged from the semiconductor manufacturing device to the valve boxes 6; a second pipe passage 13 which gathers the waste liquid coming from the plural valve boxes 6 in one place for sending it to a reservoir 2; and a liquid leakage indicator 12 which informs the leakage of the waste liquid by means of the light sensor 8.