Title:
【発明の名称】微細表面形状計測装置
Document Type and Number:
Japanese Patent JP2791121
Kind Code:
B2
Inventors:
SATO YASUSHI
OKADA TAKAO
ENOMOTO YOSHIMITSU
OKADA TAKAO
ENOMOTO YOSHIMITSU
Application Number:
JP20773889A
Publication Date:
August 27, 1998
Filing Date:
August 10, 1989
Export Citation:
Assignee:
ORINPASU KOGAKU KOGYO KK
International Classes:
G01B7/34; G01B21/30; G01N37/00; G01Q60/24; G01Q70/02; G02B21/00; H01J37/22; (IPC1-7): G01B21/30; G01N37/00; G02B21/00; H01J37/22
Domestic Patent References:
| JP318702A | ||||
| JP287009A | ||||
| JP6448862U |
Attorney, Agent or Firm:
Atsushi Tsuboi (2 outside)