Title:
【発明の名称】ドラフトチャンバ
Document Type and Number:
Japanese Patent JP2505034
Kind Code:
B2
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Inventors:
FUJITA HIROSHI
Application Number:
JP29857388A
Publication Date:
June 05, 1996
Filing Date:
November 25, 1988
Export Citation:
Assignee:
ITOKI CREBIO CORP
International Classes:
F24F7/06; B01L1/00; B08B15/02; F24F13/12; (IPC1-7): B01L1/00; F24F7/06; F24F13/12
Domestic Patent References:
| JP61164940U |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)