Title:
【発明の名称】熱処理装置
Document Type and Number:
Japanese Patent JP2733532
Kind Code:
B2
Inventors:
HATSUTORI HISASHI
IWATA TERUO
SEKIZUKA HIROSHI
IWATA TERUO
SEKIZUKA HIROSHI
Application Number:
JP4521190A
Publication Date:
March 30, 1998
Filing Date:
February 26, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
TOKYO EREKUTORON TOHOKU KK
TOKYO EREKUTORON TOHOKU KK
International Classes:
B01J3/03; F27B17/00; F27D1/00; F27D7/06; H01L21/205; (IPC1-7): B01J3/03; F27B17/00; F27D1/00; F27D7/06; H01L21/205
Domestic Patent References:
| JP1169174A | ||||
| JP5915431U |
Attorney, Agent or Firm:
Toshio Inoue