Title:
【発明の名称】熱処理装置
Document Type and Number:
Japanese Patent JP2953744
Kind Code:
B2
More Like This:
Inventors:
TANAKA SUSUMU
Application Number:
JP13087090A
Publication Date:
September 27, 1999
Filing Date:
May 21, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
H05B3/10; F27D11/02; H01L21/22; H01L21/31; H05B3/66; (IPC1-7): F27D11/02; H01L21/22; H01L21/31
Domestic Patent References:
| JP6063888A | ||||
| JP61147233U | ||||
| JP6325488U | ||||
| JP59136552U |
Attorney, Agent or Firm:
Noriyuki Kanasaka