Title:
【発明の名称】高純度ガス送達アセンブリ
Document Type and Number:
Japanese Patent JP2709858
Kind Code:
B2
Abstract:
The invention relates to a high purity gas delivery control assembly (100) having straight through gas flow. The bellows (118) which operates a gas flow interruption means (114) is isolated during gas flow and dead volumes are reduced to a minimum. This prevents the introduction of unwanted particles into the gas stream.
Inventors:
Paolo del La Porta
Application Number:
JP33883489A
Publication Date:
February 04, 1998
Filing Date:
December 28, 1989
Export Citation:
Assignee:
SAES GETERS SUCHIETA PER ACHINI
International Classes:
F16K41/10; (IPC1-7): F16K41/10
Other References:
【文献】仏国特許出願公開2151692(FR,A1)
【文献】スイス国特許発明313441(CH,A)
【文献】スイス国特許発明313441(CH,A)
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)