Title:
【発明の名称】高密度固体物質イオン生成装置
Document Type and Number:
Japanese Patent JPS5852294
Kind Code:
B2
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Inventors:
HAYASHI CHIKARA
Application Number:
JP2412976A
Publication Date:
November 21, 1983
Filing Date:
March 08, 1976
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01L21/30; H01J3/04; H01J27/00; H01J27/02; H01J27/08; H01J37/08; H05H7/08; (IPC1-7): H01J27/02; H01J3/04; H01J37/08; H05H7/08
Attorney, Agent or Firm:
Tadao Asauchi