Title:
SUPPORTING STRUCTURE FOR MICROSCOPE ON BONDING DEVICE
Document Type and Number:
Japanese Patent JPS59932
Kind Code:
A
Abstract:
PURPOSE:To enable to make simultaneous observation on a plurality of devices as well as to make observation on the device of large size without reducing magnification by a method wherein a microscope is movably provided in parallel with the direction in which semiconductor parts are conveyed. CONSTITUTION:A sliding shaft 40 is fixed on a parallel shifting block 29, a sliding block 43 is slidably inserted to the shaft 40, and a microscope shaft 50 is fixed to the block 23. When observation is going to be made, a rocking block 22 is contacted to a stopper 23, set screws 24 and 34 are tightened, and the block 43 is shifted along the shaft 40 in the state wherein a set screw 48 is loosened, thereby enabling to make simultaneous observation on a plurality of devices. As the microscope 51 can be shifted in the C and D directions which are at right angle to the direction wherein a lead frame is fed, observation of a large-sized lead frame can be made easily.
Inventors:
KITAKUBO KENJI
ARAI MITSUO
ARAI MITSUO
Application Number:
JP10912582A
Publication Date:
January 06, 1984
Filing Date:
June 26, 1982
Export Citation:
Assignee:
SHINKAWA KK
International Classes:
H01L21/52; H01L21/60; (IPC1-7): H01L21/50
Domestic Patent References:
| JPS5079260A | 1975-06-27 |
Attorney, Agent or Firm:
Yoshinori Tanabe
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