Title:
【発明の名称】混成集積回路装置
Document Type and Number:
Japanese Patent JP2667313
Kind Code:
B2
Inventors:
Youichi Yasui
Hirofumi Yamashita
Hirofumi Yamashita
Application Number:
JP19834191A
Publication Date:
October 27, 1997
Filing Date:
July 15, 1991
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/52; (IPC1-7): H01L21/52
Domestic Patent References:
| JP6141538A |
Attorney, Agent or Firm:
Hiroaki Tazawa (2 outside)