Title:
【発明の名称】赤外線CCD
Document Type and Number:
Japanese Patent JP2995960
Kind Code:
B2
Abstract:
PURPOSE:To improve sensitivity and to contrive miniaturization of a chip by a method wherein the deterioration of infrared rays, which 18 made incident from the back side of an infrared ray CCD, caused by the absorption of wafer material, is lenssened, the ratio of occupation area of the CCD section is a cell against the whole cell area is reduced, and the cell area is reduced. CONSTITUTION:In the interline type infrared ray CCD of backside incident type, a hole is made in the region corresponding to the light receiving section of an infrared ray sensing part, a light receiving and sensing part 2 is formed on the bottom part of the hole, a part of the side face of the hole is utilized as a CCD electrode 4, and the surface is covered by an oxide film 1.
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Inventors:
Makoto Asakura
Application Number:
JP27978491A
Publication Date:
December 27, 1999
Filing Date:
October 25, 1991
Export Citation:
Assignee:
NEC
International Classes:
H01L27/14; H01L27/148; H04N5/33; (IPC1-7): H01L27/14; H01L27/148; H04N5/33
Attorney, Agent or Firm:
Sugano Naka