Title:
ELECTRONIC-SUBSTRATE TREATMENT SYSTEM BY TRANSFER SYSTEM OF PORTABLE SEALED CONTAINER
Document Type and Number:
Japanese Patent JPH0669312
Kind Code:
A
Abstract:
PURPOSE: To enhance the degree of freedom of a process by eliminating a limitation in terms of time between devices and to increase the productivity of the treatment system.
CONSTITUTION: An electronic-substrate treatment system is provided with a treatment device 100 and a cleaning device 200 for an electronic substrate W. In the treatment system, a purge station 300 and a storage warehouse 400 are provided, the electronic substarte whose cleaning has been finished in the cleaning device or a cassette 70 which has been housed the electronic substrate is housed in a portable sealed container 30 inside the purge station, a gas is purged by an inert gas and the portable sealed container is stored in the storage warehouse.
Inventors:
YAMASHITA TEPPEI
MURATA MASANAO
TANAKA MIKI
MORITA AKIYA
KONO HITOSHI
HAYASHI MICHIHIRO
OKUNO ATSUSHI
NAKAMURA AKIO
MURATA MASANAO
TANAKA MIKI
MORITA AKIYA
KONO HITOSHI
HAYASHI MICHIHIRO
OKUNO ATSUSHI
NAKAMURA AKIO
Application Number:
JP22147492A
Publication Date:
March 11, 1994
Filing Date:
August 20, 1992
Export Citation:
Assignee:
SHINKO ELECTRIC CO LTD
International Classes:
B25J19/00; H01B13/00; H01L21/673; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J19/00; H01B13/00
Attorney, Agent or Firm:
Kobayashi
Next Patent: 樹脂製サイレンサー装置