Title:
【発明の名称】イオン中和器
Document Type and Number:
Japanese Patent JP2717172
Kind Code:
B2
Inventors:
Kazutoshi Nagai
Application Number:
JP19513088A
Publication Date:
February 18, 1998
Filing Date:
August 04, 1988
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G21K1/00; C23C14/22; C23C14/24; G21K1/14; H01J37/317; H01L21/203; H05H3/02; (IPC1-7): G21K1/14; H05H3/02
Attorney, Agent or Firm:
Masatake Shiga