Title:
【発明の名称】積層型変位素子
Document Type and Number:
Japanese Patent JP2812994
Kind Code:
B2
Abstract:
PURPOSE:To prevent a title device from being cracked by absorbing the displacement of the displacement device without steeply changing said displacement by providing a notch in the vicinity of an external electrode formed at a corner of a laminate, and progressively decreasing an internal electrode area as it goes outside. CONSTITUTION:Many thin-shaped displacement devices 1 are laminated via an internal electrode 2 of substantially the same flat plane shape, and external electrodes 3 are provided at adjacent two corners of the devices. The respective external electrodes are connected to every two internal electrodes 2, and a large displacement is attained by applying voltage to a pair of the electrodes 3. A small width part 5 is formed at the corner of the device, which is defined by a notch 4 arcuated in the depth thereof and protected from stress concentration. Parts of the electrode 2 located at the small width part are superimposed and are alternately formed one after another shorter at external ends thereof to enable the even two electrodes 3 formed on the outer end of the electrode 2 to be connected with ease. The device does not have any abnormality at about twice vibrations where the device not including any notch 4 is cracked near the electrode 3.
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Inventors:
Shigeru Sadamura
Junichi Watanabe
Somehiro Takahiro
Junichi Watanabe
Somehiro Takahiro
Application Number:
JP19008689A
Publication Date:
October 22, 1998
Filing Date:
July 22, 1989
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
H01L41/083; H01L41/09; (IPC1-7): H01L41/083
Domestic Patent References:
| JP62200778A | ||||
| JP1157581A | ||||
| JP2237083A |
Attorney, Agent or Firm:
Yamato Tsutsui (2 outside)