Title:
【発明の名称】レーザシステム
Document Type and Number:
Japanese Patent JP2003510825
Kind Code:
A
Abstract:
A laser system (1) for producing a line beam laser output (4) comprises a laser source (6), and a lens system (12) for modifying the intensity profile of the incident laser input, and comprising a plurality of lens elements (16) arranged at a predetermined lens pitch. An optical filter (9) is provided between the laser source (6) and the lens system (12), the filter comprising transmissive portions (42) and opaque portions (44). The transmissive portions (42) define a repeating pattern (46) with a pitch corresponding to the lens pitch. The optical filter (9) modifies the input to the lens system (12) such that the output of the lens system gives rise to a desired intensity profile at the output of the laser system (1). This desired profile can have a tapered profile at the top of the hat, which gives improved performance for laser crystallization. The invention can be implemented with minimum adaptation of an existing top hat profile laser system.
Inventors:
David Ye MacRocchi
Application Number:
JP2001526325A
Publication Date:
March 18, 2003
Filing Date:
September 14, 2000
Export Citation:
Assignee:
Konin Krekka Philips Electronics NV
International Classes:
G02B5/02; B23K26/06; B23K26/073; G02B3/00; G02B5/28; G02B19/00; G02B27/09; H01L21/20; H01L21/268; H01S3/00; H01S3/10; H01S3/101; B23K101/40; (IPC1-7): H01L21/268; B23K26/06; G02B3/00; G02B5/02; G02B5/28; G02B19/00; H01L21/20; H01S3/10; H01S3/101
Domestic Patent References:
| JPH11214324A | 1999-08-06 | |||
| JPH10223554A | 1998-08-21 |
Attorney, Agent or Firm:
Sugimura Kosaku (1 person outside)