Title:
【発明の名称】液体原料気化装置
Document Type and Number:
Japanese Patent JP2662993
Kind Code:
B2
Inventors:
Takayuki Todo
Takehiko Futaki
Yokoyama Hidechika
Takehiko Futaki
Yokoyama Hidechika
Application Number:
JP19969888A
Publication Date:
October 15, 1997
Filing Date:
August 10, 1988
Export Citation:
Assignee:
High purity chemical research institute
International Classes:
B01D1/16; B01J7/02; C23C16/44; C23C16/448; H01L21/205; (IPC1-7): C23C16/44; B01J7/02; H01L21/205
Domestic Patent References:
| JP5588142U | ||||
| JP60139107U | ||||
| JP4816032U |