Title:
【発明の名称】理化学機械用送液装置
Document Type and Number:
Japanese Patent JP2544212
Kind Code:
B2
Inventors:
SANUKI SANNOSUKE
Application Number:
JP30808989A
Publication Date:
October 16, 1996
Filing Date:
November 28, 1989
Export Citation:
Assignee:
SANUKI KOGYO KK
International Classes:
F04B49/00; F04B7/00; F04B13/00; (IPC1-7): F04B13/00; F04B7/00
Domestic Patent References:
| JP60113149A | ||||
| JP5025101U |
Attorney, Agent or Firm:
Masao Tanaka