Title:
【発明の名称】マグネトロンスパッタリング装置
Document Type and Number:
Japanese Patent JP2549291
Kind Code:
B2
Inventors:
SUGANO YOSHIO
Application Number:
JP12501887A
Publication Date:
October 30, 1996
Filing Date:
May 23, 1987
Export Citation:
Assignee:
TOKIN CORP
International Classes:
C23C14/36; C23C14/35; (IPC1-7): C23C14/35
Domestic Patent References:
| JP57188679A | ||||
| JP5881969A | ||||
| JP6260866A |
Attorney, Agent or Firm:
Tan Ashida (2 outside)