【発明の名称】マーク位置検出方法

Title:

【発明の名称】マーク位置検出方法

Document Type and Number:

Japanese Patent JP2550104

Kind Code:

B2

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Inventors:

OKUMURA MASAHIDE
MATSUOKA GENYA
ANDO HIROZUMI
SASAKI MINORU
KAWASAKI KATSUHIRO

Application Number:

JP26377387A

Publication Date:

November 06, 1996

Filing Date:

October 21, 1987

Export Citation:

Assignee:

HITACHI LTD

International Classes:

G03F9/00; G01B15/00; G03F7/20; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): G01B15/00; G03F9/00; H01L21/027; H01L21/68

Domestic Patent References:

Attorney, Agent or Firm:

Katsuo Ogawa (1 person outside)

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