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Title:
【発明の名称】変質層の形成方法
Document Type and Number:
Japanese Patent JP2558289
Kind Code:
B2
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Inventors:
HAYASHI YUTAKA
FUJITA SHUNSUKE
Application Number:
JP20583787A
Publication Date:
November 27, 1996
Filing Date:
August 19, 1987
Export Citation:
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Assignee:
KOGYO GIJUTSU INCHO
RIKOO KK
International Classes:
H01L21/318; H01L21/316; (IPC1-7): H01L21/318; H01L21/316
Domestic Patent References:
JP58158968A
JP59161070A
JP58143560A
Attorney, Agent or Firm:
Toru Kabayama (1 person outside)
Toru Kabayama (1 person outside)



 
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