Title:
【発明の名称】銅配線膜の形成方法
Document Type and Number:
Japanese Patent JP3084727
Kind Code:
B2
Inventors:
Keiji Shinohara
Application Number:
JP15484090A
Publication Date:
September 04, 2000
Filing Date:
June 12, 1990
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L23/52; H01L21/3205; (IPC1-7): H01L21/3205
Domestic Patent References:
| JP6471151A | ||||
| JP6373645A | ||||
| JP1160035A | ||||
| JP3153077A |
Attorney, Agent or Firm:
Hideaki Ogawa