Title:
【発明の名称】電子装置の製造方法
Document Type and Number:
Japanese Patent JP3355251
Kind Code:
B2
Abstract:
Oxide films, and residues of organic matters, carbons, if any, are removed from a metal surface simply without using complicated steps and without giving adverse effects on electronic parts or electronic devices by irradiating the metal surface with a laser beam of lower energy level than energy capable of changing the metal surface structure, thereby cleaning the metal surface.
Inventors:
Kaoru Katayama
Hiroshi Fukuda
Shinichi Wai
Toshihiko Ohta
Yasuhiro Iwata
Hiroshi Fukuda
Shinichi Wai
Toshihiko Ohta
Yasuhiro Iwata
Application Number:
JP23981394A
Publication Date:
December 09, 2002
Filing Date:
October 04, 1994
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B08B7/00; B23K1/00; B23K1/20; B23K26/00; B23K26/40; C23G5/00; H01L21/306; H01L21/60; H01L23/10; H05K3/34; (IPC1-7): B23K26/00; B08B7/00; B23K1/00; C23G5/00; H05K3/34
Domestic Patent References:
| JP4182020A | ||||
| JP55119183A | ||||
| JP55119181A | ||||
| JP62104A | ||||
| JP774135A | ||||
| JP799382A | ||||
| JP687067A |
Attorney, Agent or Firm:
Shuuki Akita