【発明の名称】シリコンウェーハの製造方法

Title:

【発明の名称】シリコンウェーハの製造方法

Document Type and Number:

Japanese Patent JP2587714

Kind Code:

B2

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Inventors:

SHIRAI HIROSHI
WATANABE MIKIO
TAKASU SHINICHIRO

Application Number:

JP22471490A

Publication Date:

March 05, 1997

Filing Date:

August 27, 1990

Export Citation:

Assignee:

TOSHIBA CERAMICS CO

International Classes:

G01N21/35; G01N21/3563; H01L21/02; H01L21/304; H01L21/322; H01L21/66; (IPC1-7): H01L21/304; G01N21/35; H01L21/02; H01L21/66

Attorney, Agent or Firm:

Toru Tanabe

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