Title:
【発明の名称】有機膜の作製方法
Document Type and Number:
Japanese Patent JP2862005
Kind Code:
B2
Abstract:
PURPOSE:To obtain an organic film of a superlattice structure and controlled in the orientation of molecules by gasifying electron accepting organic molecules and electron donating organic molecules in a vacuum chamber to arrive at a substrate, binding both adjacent layers on the substrate to be alternately deposited. CONSTITUTION:One of shutters 25a-25c is opened to allow a solid source of gasified electron donating organic molecules (D) of corresponding K cells 24a-24c to arrive at a substrate 4, and the source is adsorbed to the substrate 4. when a single molecule layer is formed, the shutter is closed, and the molecules D are discharged. Then, the other shutters are opened, the solid source of electron accepting organic molecules (A) is allowed to arrive at the substrate, and the molecules D are bound to the molecules A. This is repeated to alternately form moleculor layers of the molecules D and A on the substrate 4. Thus, an organic film of a superlattice structure and controlled in the orientation ot the molecules can be formed.
Inventors:
YOSHIMURA TETSUZO
KUBOTA YOSHINOBU
KUBOTA YOSHINOBU
Application Number:
JP32383287A
Publication Date:
February 24, 1999
Filing Date:
December 23, 1987
Export Citation:
Assignee:
FUJITSU KK
International Classes:
C08F2/48; C08F2/00; C08F2/52; C23C14/12; C30B29/54; G02F1/1337; G02F1/35; G02F1/355; G02F1/361; G03G5/00; G03G5/06; H01L21/363; H01L51/00; H01L51/05; H01L51/40; (IPC1-7): H01L21/363; C08F2/48; C08F2/52; C23C14/12; C30B29/54; G02F1/1337; G02F1/35; G03G5/00; G03G5/06; H01L51/00
Domestic Patent References:
| JP61202420A | ||||
| JP61124122A |
Other References:
「化学と工業」，第４０巻，第１０号，（１９８７−１０−１），ｐｐ．８２６−８９５
「真空」，第３０巻，第１１号，（１９８７−１１−２０），ｐｐ．８５３−８６４
「真空」，第３０巻，第１１号，（１９８７−１１−２０），ｐｐ．８５３−８６４
Attorney, Agent or Firm:
Aoki Akira (2 outside)