Title:
【発明の名称】シランガスの製造法
Document Type and Number:
Japanese Patent JP2523123
Kind Code:
B2
Inventors:
INABA SHINICHI
NAGAHAMA HIDEKI
NAGAHAMA HIDEKI
Application Number:
JP4370187A
Publication Date:
August 07, 1996
Filing Date:
February 26, 1987
Export Citation:
Assignee:
CHISSO CORP
International Classes:
C01B33/04; B01J21/06; B01J21/10; B01J23/02; B01J23/34; B01J23/44; B01J23/72; B01J23/74; B01J23/755; (IPC1-7): C01B33/04; B01J21/06; B01J21/10; B01J23/02; B01J23/34; B01J23/44; B01J23/72; B01J23/755
Domestic Patent References:
| JP6126120A | ||||
| JP4941321A |
Attorney, Agent or Firm:
Hiromitsu Fujimoto (2 outside)