Title:
【発明の名称】希ガスの精製方法
Document Type and Number:
Japanese Patent JP2981396
Kind Code:
B2
Abstract:
PURPOSE:To recirculate impurity gas, generated in the separating and fractionating cylinder of a rare gas refining device and thrown away conventionally, and increase the amount of collection, upon fractionating and separating Kr, Xe after removing methane and oxygen from the reproduced liquefied oxygen of the deep freezing and separating device of air. CONSTITUTION:A tank 8 for extracting impurity gas 30, having a boiling point lower than rare gas, out of a separating and fractionating cylinder 7 to the outside of a system and reserving it once, a regulating valve 9, regulating the flow rate of the impurity gas, and devices 10, 11 for removing the impurities of hydrogen and nitrogen in the tank 8, are provided to process the impurity gas 30 and return the processed gas 37 to the fore process of a methane removing device 5.
Inventors:
OGINO SATORU
NAKAJIMA YASUHISA
NAKAJIMA YASUHISA
Application Number:
JP6335994A
Publication Date:
November 22, 1999
Filing Date:
March 31, 1994
Export Citation:
Assignee:
KAWASAKI SEITETSU KK
International Classes:
C01B23/00; F25J3/04; F25J3/08; (IPC1-7): F25J3/04; C01B23/00; F25J3/08
Domestic Patent References:
| JP2282682A | ||||
| JP545051A |
Attorney, Agent or Firm:
Yoshio Kosugi (2 outside)