【発明の名称】磁気抵抗素子の製造方法 - Matsushita Electric Industrial Co., Ltd

Title:

【発明の名称】磁気抵抗素子の製造方法

Document Type and Number:

Japanese Patent JP2606224

Kind Code:

B2

Abstract:

PURPOSE:To easily obtain a uniform resistance element at a low temperature by thermally decomposing an organic compound layer containing magnetic metal as a metal oxide, obtaining a thin metal film and patterning it. CONSTITUTION:An organic compound layer containing magnetic metal in a structure is formed by various printing methods on a substrate. The layer containing the magnetic metal in the structure is thermally decomposed in an oxidative atmosphere as a metal oxide layer. Then, it is heat treated in a reducing atmosphere as a thin magnetic metal film, and then patterned to manufacture a magnetoresistance element.

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Inventors:

Taba Munehiro
Hasegawa Hiroshi
Yasuhito Isozaki
Kazuyuki Okano
Chiharu Niki

Application Number:

JP21206687A

Publication Date:

April 30, 1997

Filing Date:

August 26, 1987

Export Citation:

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Assignee:

Matsushita Electric Industrial Co., Ltd

International Classes:

H01L43/12; G11B5/39; (IPC1-7): H01L43/12

Attorney, Agent or Firm:

Tomoyuki Takimoto (1 person outside)

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