Title:
【発明の名称】焦電素子の製造方法
Document Type and Number:
Japanese Patent JP2987476
Kind Code:
B2
Abstract:
PURPOSE:To provide a manufacturing method of pyro-electric elements which is capable of making the polalization process for various types of pyro-elements easier, and of achieving the improvement of mass-productivity. CONSTITUTION:Leader electrodes 6, 8, a dummy electrode 12, first and second auxiliary electrodes 9, 13 are formed on an insulating substrate 1 from which multiple insulating plates are taken, plural pyro-electric body-sheets 3 on which first - fourth, seventh, tenth, eleventh electrodes are formed, are supported on the insulating substrate, the leader electrode 6 and a gate terminal (a) of FET 5 are connected to the first electrode 4, the leader electrode 8 is connected to the second electrode 7, the dummy electrode is connected to an electric connection part (c) between the third and fourth electrodes, and high resistances 14 are connected to a gate terminal (a) and an earth terminal (b). After the pyro-electric body-sheets are polarized-processed by applying dc voltage between the auxiliary electrodes, the insulating substrate is cut in a state where electric connections of the leader electrodes and the dummy electrode to the auxiliary electrodes are cut out.
Inventors:
OKAMOTO KAZUTAKA
MATSUMOTO KOICHI
TAKADA HIDEJI
NAKANE MASAMI
MATSUMOTO KOICHI
TAKADA HIDEJI
NAKANE MASAMI
Application Number:
JP10372892A
Publication Date:
December 06, 1999
Filing Date:
March 30, 1992
Export Citation:
Assignee:
HORIBA SEISAKUSHO KK
International Classes:
G01J1/02; G01J5/02; G01J5/34; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L37/02
Domestic Patent References:
| JP5133802A | ||||
| JP1227930A | ||||
| JP6461618A | ||||
| JP61116628A | ||||
| JP1180730U |
Attorney, Agent or Firm:
Hideo Fujimoto