BELT DRIVING GEAR - NIKON CORP

Title:

BELT DRIVING GEAR

Document Type and Number:

Japanese Patent JPH085358

Kind Code:

A

Abstract:

PURPOSE: To maintain the straightness of a guide by preventing the deformation of the guide due to the tension of a belt for a driving gear.

CONSTITUTION: A driving gear 18 is arranged on the side of the back 6a of an X-axis guide 6, a tension generation mechanism 19 is arranged on the side of the front 6b of the X-axis guide 6, and the tension of a belt 15 for the driving gear 18 is offset by the tension of the tension generation mechanism 19. In addition, the thermal expansion amount of the tension generation mechanism 19 is made nearly equal to the thermal expansion amount of the belt 15 for the driving gear 18, and the thermal expansion and contraction on the side of the driving gear 18 is offset by the tension generation mechanism 19. By adopting this constitution, it is possible to prevent the deformation of the X-axis guide 6.

Inventors:

SHIMIZU FUSAO

Application Number:

JP15539594A

Publication Date:

January 12, 1996

Filing Date:

June 14, 1994

Export Citation:

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Assignee:

NIKON CORP

International Classes:

G01B21/20; (IPC1-7): G01B21/20

Attorney, Agent or Firm:

Osamu Kiuchi

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