Title:
【発明の名称】超電導電子装置の作製方法
Document Type and Number:
Japanese Patent JP2654555
Kind Code:
B2
Abstract:
PURPOSE:To obtain a product having a high critical superconducting temperature with high reproducibility by forming an electronic device of a thin film of an oxide superconducting material and an interlayer isolating film of an oxide nonsuperconducting material containing the same main ingredients as those of the thin film for holding the thin film. CONSTITUTION:A nonsuperconducting thin film 1' of a material containing the same main ingredients as those of an oxide superconducting material is previously formed on a surface of a base 1 to be formed in a desired shape. Then, a film 5 of an oxide superconducting material is formed by a method such as a sputtering method, etc. In this case, the film 5 is so formed that a surface ab of the superconducting material becomes parallel to the surface to be formed. Then, the superconducting material is removed in a stripe shape having a predetermined width by a method such as irradiation with a laser light, etc., to obtain stripes 5-1, 5-2,..., of a superconducting thin film. Further, a thin film 6 of a nonsuperconducting material is formed as an interlayer isolating film. Thus, an electronic device using the oxide superconducting material is obtained.
Inventors:
YAMAZAKI SHUNPEI
Application Number:
JP9481991A
Publication Date:
September 17, 1997
Filing Date:
April 01, 1991
Export Citation:
Assignee:
HANDOTAI ENERUGII KENKYUSHO KK
International Classes:
C04B41/87; C01G1/00; H01B12/06; H01F6/06; H01L39/02; (IPC1-7): H01F6/06; C04B41/87; H01B12/06; H01L39/02
Domestic Patent References:
| JP6161555B2 |
Other References:
Ｊａｐａｎｅｓｅ Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ ｐｈｙｓｉｃｓ Ｖｏｌ．２６ Ｎｏ．３（１９８７）．Ｐ．Ｌ２０３−２０５
電子情報通信学会技術研究報告 Ｖｏｌ．８７ Ｎｏ．１３７ Ｐ．４９−５４
電子情報通信学会技術研究報告 Ｖｏｌ．８７ Ｎｏ．１３７ Ｐ．４９−５４