Title:
【発明の名称】酸化物超電導膜の製造方法
Document Type and Number:
Japanese Patent JP3017886
Kind Code:
B2
Abstract:
PURPOSE:To provide an oxide superconductive film excellent in characteristics by making an intermediate layer of YSZ(yttria stabilizing zirconia) or MgO (magnesium oxide) having a small surface roughness, and forming an oxide superconductive film on the intermediate layer. CONSTITUTION:YSZ or MgO is used as a target 4. Abrasion is generated by a laser beam radiated from a laser generator 1 so that an intermediate layer is formed of particles 5 on a substrate 6 at the atmosphere of oxygen of 10 mTorr and less. Accordingly, an average freedom stroke of the scattering particles becomes longer and the particles are accumulated until they grow to become large particles, thus obtaining the intermediate layer excellent in crystallinity and surface property and having a small surface roughness. When an oxide superconductive layer is formed on the intermediate layer having a small surface roughness, it is possible to manufacture an oxide superconductive film excellent in superconductivity by a film thickness averaging effect, a film surface smoothing effect, and an orientation enhancing effect.
Inventors:
Gozo Fujino
Satoru Takano
Noriyuki Yoshida
Tsukushi Hara
Hideo Ishii
Satoru Takano
Noriyuki Yoshida
Tsukushi Hara
Hideo Ishii
Application Number:
JP20386092A
Publication Date:
March 13, 2000
Filing Date:
July 30, 1992
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
THE TOKYO ELECTRIC POWER COMPANY,INCORPORATED
THE TOKYO ELECTRIC POWER COMPANY,INCORPORATED
International Classes:
C01G1/00; C23C14/08; C30B23/08; C30B29/22; H01B12/06; H01B13/00; (IPC1-7): H01B13/00; C01G1/00; C23C14/08; C30B23/08; C30B29/22
Domestic Patent References:
| JP339458A |
Attorney, Agent or Firm:
Fukami Hisaro (3 outside)