Title:
【発明の名称】マイクロメカニカル回転速度センサ
Document Type and Number:
Japanese Patent JP3061864
Kind Code:
B2
Abstract:
PCT No. PCT/EP96/02333 Sec. 371 Date Nov. 18, 1997 Sec. 102(e) Date Nov. 18, 1997 PCT Filed May 30, 1996 PCT Pub. No. WO96/38710 PCT Pub. Date Dec. 5, 1996A micromechanical rate-of-rotation sensor based on the coriolis principle includes two plate-like oscillators electrostatically driven to oscillate out-of-phase. The oscillators are arranged one above another in alignment to oscillate via plate-like support structures separated from one another by a very small drive capacitor gap. By suitable selection of the natural frequency of the support structure parts, due to a significantly-larger distance between the oscillators, it is possible to achieve larger amplitudes of oscillation and, hence, a high oscillation quality, unlimited by the drive capacitor gap (which is narrow for reasons of good stimulation at small excitation voltages). The two oscillator structures in each case preferably comprise two electrically mutually insulated bonded parts suspended via springs within a frame and configured so that essentially only rotational oscillator movements are possible with linear movements of the oscillators in the +/-z spatial direction largely suppressed.
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Inventors:
Rilco, Brnoev.
Handrich, Eberhard
Brengue, Uwe
Martin Haffen
Handrich, Eberhard
Brengue, Uwe
Martin Haffen
Application Number:
JP53620196A
Publication Date:
July 10, 2000
Filing Date:
May 30, 1996
Export Citation:
Assignee:
Lithev Gezel Shaft Mitt Beschlenktel Haftung
International Classes:
G01C19/56; G01C19/5656; G01P9/04; G01P15/08; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP61102518A | ||||
| JP63154915A |
Attorney, Agent or Firm:
Kenzo Hara