Title:
【発明の名称】マイクロ波プラズマ処理装置
Document Type and Number:
Japanese Patent JP2666697
Kind Code:
B2
Inventors:
Tohru Otsubo
Yasuhiro Yamaguchi
Takehiko Naohiko
Yasuhiro Yamaguchi
Takehiko Naohiko
Application Number:
JP25799493A
Publication Date:
October 22, 1997
Filing Date:
October 15, 1993
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B01J19/10; C23C14/35; C23C16/50; C23C16/511; C23F4/00; H01L21/203; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): C23C14/35; B01J19/10; C23C16/50; C23F4/00; H01L21/203; H01L21/205; H01L21/3065
Domestic Patent References:
| JP6213575A |
Attorney, Agent or Firm:
Ogawa Katsuo