【発明の名称】マイクロ波プラズマ処理装置

Title:

【発明の名称】マイクロ波プラズマ処理装置

Document Type and Number:

Japanese Patent JP2685584

Kind Code:

B2

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Inventors:

Takuya Fukuda
Oue Michio
Konishi Nobutake
Sonobe Tadashi
Kazuo Suzuki

Application Number:

JP13904189A

Publication Date:

December 03, 1997

Filing Date:

June 02, 1989

Export Citation:

Assignee:

株式会社日立製作所
株式会社日立エンジニアリングサービス

International Classes:

C23C16/50; C23C16/511; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; H01L21/3205; H01L21/3213; (IPC1-7): C23C16/50

Domestic Patent References:

JP6486515A
JP63217620A

Attorney, Agent or Firm:

Katsuo Ogawa (1 person outside)

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