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Title:
【発明の名称】ミラー汚染検出装置
Document Type and Number:
Japanese Patent JP2946399
Kind Code:
B2
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Inventors:
KATO TAKANORI
Application Number:
JP9704895A
Publication Date:
September 06, 1999
Filing Date:
April 21, 1995
Export Citation:
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Assignee:
SUMITOMO JUKIKAI KOGYO KK
International Classes:
G01N21/88; B29C59/16; B29C71/04; G01N21/94; G03F7/20; G21K1/06; G21K5/02; H05H13/04; (IPC1-7): H05H13/04; B29C59/16; B29C71/04; G21K1/06; G21K5/02
Domestic Patent References:
JP5288696A
JP8183106A
JP60138247U
JP60138248U
Attorney, Agent or Firm:
Yosuke Goto (1 person outside)



 
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