Title:
【発明の名称】マルチプローブヘッド
Document Type and Number:
Japanese Patent JP2997133
Kind Code:
B2
Abstract:
PURPOSE:To obtain a multi-probe head used for a recoding and reproducing device using the principle of a scanning type electron microscope, forming a read/write circuit on the same substrate as a probe electrode and reading a signal from the probe electrode with a high S/N. CONSTITUTION:The probe electrode Pi,j is connected to the base of a transistor TRi,j, and an analog switch SBi.j for applying bias voltage to the probe electrode Pi,j is provided. Further, the analog switch SAi,j is provided on the emitter side of the transistor TRi,j. By detecting the flowing out of charge stored in the base capacitance of the transistor TRi,j as tunnel current by an emitter follower circuit consisting of the transistor TRi,j, the signal is read from the probe electrode Pi,j.
Inventors:
Takahiro Oguchi
Katsunori Hatanaka
Kunihiro Sakai
Akihiko Yamano
Shunichi Shidou
Katsunori Hatanaka
Kunihiro Sakai
Akihiko Yamano
Shunichi Shidou
Application Number:
JP17333192A
Publication Date:
January 11, 2000
Filing Date:
June 30, 1992
Export Citation:
Assignee:
Canon Inc
International Classes:
G11B9/00; G01N37/00; G01Q60/10; G01Q70/06; G01Q80/00; G11B9/04; G11B9/14; H01J37/28; (IPC1-7): G11B9/00; G11B9/04
Domestic Patent References:
| JP349087A | ||||
| JP2176405A |
Other References:
【文献】特許2930454(JP,B2)
Attorney, Agent or Firm:
Tadashi Wakabayashi