Title:
METHOD FOR CONTROLLING LATTICE DEFECT OF DIAMOND
Document Type and Number:
Japanese Patent JPH0648892
Kind Code:
A
Abstract:
PURPOSE: To control the lattice defect of diamond capable of forming concd. lattice defects by suppressing the graphitization of diamond.
CONSTITUTION: A diamond thin film 1 having lattice defects due to the ion damage by the implantation of nitrogen ion and formed by CVD is kept at ≤10-5Torr by a pump 4, and an UV 7 of about 308nm wavelength from an excimer laser 6 is condensed by a lens 8 and passed through a UV-transmissive window 5 to irradiate the diamond thin film 1 at about 400 mJ/shot, with the cycle of about 10 shot/sec and at about 100 shots (10 sec).
Inventors:
KITAHATA MAKOTO
DEGUCHI MASAHIRO
HIRAO TAKASHI
DEGUCHI MASAHIRO
HIRAO TAKASHI
Application Number:
JP20283892A
Publication Date:
February 22, 1994
Filing Date:
July 30, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B01J19/12; C30B29/04; C30B31/20; C30B33/00; (IPC1-7): C30B29/04; B01J19/12; C30B31/20; C30B33/00
Attorney, Agent or Firm:
Hiroyuki Ikeuchi (1 person outside)
Next Patent: METHOD FOR SURFACE-TREATING DIAMOND