Title:
【発明の名称】多自由度位置決めステージ
Document Type and Number:
Japanese Patent JP3377168
Kind Code:
B2
Inventors:
Yoshiaki Kurata
Koji Oshima
Shuhei Ono
Koji Oshima
Shuhei Ono
Application Number:
JP27871297A
Publication Date:
February 17, 2003
Filing Date:
October 13, 1997
Export Citation:
Assignee:
Hephaist Seiko Co., Ltd.
International Classes:
B23Q3/04; B23P19/00; B23Q1/00; B23Q1/25; B23Q1/64; G02B7/198; G12B5/00; H01Q1/12; (IPC1-7): G12B5/00; B23P19/00; B23Q1/25; G02B7/198; H01Q1/12
Attorney, Agent or Firm:
Koji Misaki